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Most cited (updated monthly)

  • Study of horizontal and vertical uniformity of B-doped layer on mosaic single crystal diamond wafers by using hot-filament chemical vapor deposition

    Hideaki Yamada,
    Takehiro Shimaoka

    Aiming at developing inch-sized processing of diamond, B-doped layer was grown on mosaic single-crystallin diamond wafers by using hot-filament chemical vapor deposition (CVD), which is expected to have an advantage in terms of the deposition area compared with microwave plasma (MWP) CVD. Uniformity in horizontal and vertical directions is studied. It is found that the junctions of the monocrystalline diamond domains in the mosaic wafer and the direction of the crystal off-angles against to these junctions are less effective to the uniformity of the impurity concentrations. On the other hand, it is suggested that excess incorporation of W from the filament suppresses the growth and incorporation of B. It is shown that millimeter scale or more precise control of the arrangement of the wafer and the filament enables to obtain more uniform and efficient doping.

    Keywords:
    HFCVD;
    B-doping;
    semiconductor
    Functional Diamond
    Volume 2, Issue 1 (2022)
  • Orientated growth the 3D diamond/graphene hybrid arrays and the application in thermal interface materials

    Guorong Zhang,
    Huiqiang Liu,
    Yangxin Xiao,
    Bing Wang,
    Jian Wang,
    Wen Zhang,
    Ying Xiong
    Diamond and graphene are considered to be one of the most promising thermal interface materials (TIMs) for electronic devices benefited from their highest thermal conductivity in the natural world. However, orientated fabrication of high thermal conductivity diamond and graphene hybrid arrays with three dimensions (3 D) thermal conductive networks are still problematic. Here, we used a unique one-step microwave plasma chemical vapor deposition, n-butylamine, as the liquid source to prepare a novel high thermal conductivity 3 D vertical diamond/graphene (VDG) hybrid arrays films. The orientated 3 D thermal conduction path of the VDG is regulated by the growth temperature, and the through-plane thermal conductivity value of the VDG700 films up to 97 W m−1 K−1. In the actual TIM performance measurement, the system cooling efficiency with our VDG as TIM is higher than the state-of-the-art commercial TIM, demonstrating the superior ability to solve the inter-facial heat transfer issues in electronic systems.
    Keywords:
    CVD;
    liquid source;
    hybrid films;
    heat dissipation
    Functional Diamond
    Volume 2, Issue 1 (2022)
  • The polishing methods for large area CVD diamond wafer

    Haochen Zhang,
    Zengyu Yan,
    Zhipeng Song,
    Shuai Zhou,
    Zilong Zhang,
    Guo Chen,
    Meiyong Liao,
    Guangchao Chen
    AbstractThe mainstream polishing methods were reviewed in light of polycrystalline CVD diamond wafer with large area. The principles, equipment, and processes of the mainstream polishing methods were reviewed, and the processing characteristics of these methods were compared. The material removal rate (MRR), polishing rate (PR), and minimum surface roughness (Ra) obtained by each polishing method were summed up. The non-contact method has a relatively higher MRR than the contact method, while the contact method has a relatively smaller final roughness than the non-contact method. Two factors, K (K = ΔRa/Δm, ΔRa is the reduction of the surface roughness, Δm is the mass loss) and CI (CI = K/t, t is the total polishing time), were proposed to evaluate the influence of the polishing parameters on the polishing course in the contact polishing methods and to describe the feature of each polishing method, respectively. The variation of the K value indicated that the polishing load and the polishing plate speed did not always influence the polishing effect monotonically in every contact polishing method, and it should be optimized to obtain fine surface roughness with the tiny mass loss. The CI value showed that the non-contact polishing method possessed the feature of high roughness improvement with low mass loss in the unit polishing time. These results reveal how to move forward on the path to polishing large area polycrystalline CVD diamond wafer.
    Keywords:
    CVD diamond;
    polycrystalline wafer;
    polishing;
    surface roughness;
    mass loss
    Functional Diamond
    Volume 3, Issue 1 (2023)
  • Heteroepitaxy of diamond semiconductor on iridium: a review

    Weihua Wang,Benjian Liu,Leining Zhang,Jiecai Han,Kang Liu,Bing Dai,Jiaqi Zhu

    As one of the representatives of carbon-based semiconductors, diamond is called the “Mount Everest” of electronic materials. To maximize its properties and realize its industrial applications, the fabrication of wafer-scale high-quality diamonds is critical. To date, heteroepitaxy is considered as a promising method for the growth of diamond wafers with considerable development. In this review, fundamentals of diamond heteroepitaxy is firstly introduced from several perspectives including nucleation thermodynamics and kinetic, nucleation process at the atomic level, as well as the interplay between the epitaxial film and substrate. Second, the bias enhanced nucleation (BEN) method is reviewed, including BEN setup, BEN process window, nucleation phenomenology (mainly on Iridium), nucleation mechanism by ion bombardment, and large-scale nucleation realization. Third, the following textured growth process is presented, as well as grain boundary annihilation, and dislocation and stress reduction technologies. Fourth, the applications of diamonds in electronic devices are studied, showing its excellent performances in the future power and electronic devices. Finally, prospects in this field are proposed from several aspects.

    Keywords:
    Diamond wafer;
    heteroepitaxy;
    large size;
    bias enhanced nucleation;
    textured growth;
    electronic applications
    Functional Diamond
    Volume 2, Issue 1 (2022)
  • Heat transfer enhancement by diamond nanofluid in gravity heat pipe for waste heat recovery

    Ning Qian,Fan Jiang,Jiajia Chen,Yucan Fu,Jingzhou Zhang,Jiuhua Xu

    Waste heat recovery is significant for improving energy utilization, reducing carbon emissions, and neutrality. The gravity heat pipe (GHP) has excellent thermal performance due to the cyclic phase transformation of the working fluid. As an important thermal management device for waste heat recovery, the heat transport capacity of GHP improves, the efficiency and performance of the waste heat recovery increase, and more wasted heat can be stored more quickly. Nano-diamond has the highest thermal conductivity and can be dispersed in water to form a diamond nanofluid, enhancing the thermal performance of GHP. In contrast, the study on the heat transfer behavior of the diamond nanofluid in GHP is insufficient. Besides, the influences of filling ratio (FR), mass fraction (MF), and heat flux on thermal performance are in demand for further study. In this article, the heat transfer behavior is investigated by studying the flow patterns of diamond nanofluids. The influences of filling ratio and mass fraction on flow patterns are analyzed. An orthogonal experiment is conducted; the heat flux has the most significant effect on the thermal performance, followed by the filling ratio and mass fraction. The thermal performance is the best when the optimal parameters (FR = 20%, MF = 1 w.t.%) are selected under a heat flux of 20 × 104 W/m2. The equivalent heat transfer coefficient reaches 3485 W/(m2·°C). This article can achieve a deeper understanding of the diamond nanofluid heat transfer mechanism in GHP and enhance the thermal performance of GHP for better waste heat recovery.

    Keywords:
    Nano-diamond;
    gravity heat pipe;
    heat transfer;
    mass fraction;
    filling ratio
    Functional Diamond
    Volume 2, Issue 1 (2022)
  • Nanoscale detection and real-time monitoring of free radicals in a single living cell under the stimulation of targeting moieties using a nanodiamond quantum sensor

    Kaiqi Wu,
    Qi Lu,
    Maabur Sow,
    Priyadharshini Balasubramanian,
    Fedor Jelezko,
    Tanja Weil,
    Yingke Wu
    Keywords:
    Nanodiamond;
    cell targeting peptides;
    in-cell free radicals detection;
    nitrogen-vacancy center;
    quantum sensor;
    T1 relaxometry
    Functional Diamond
    Volume 4, Issue 1 (2024)
  • Fabrication of low thermal resistance 3C-SiC/diamond structure for GaN epitaxial layer growth

    Ryo Kagawa,
    Yutaka Ohno,
    Yasuyoshi Nagai,
    Naoteru Shigekawa,
    Jianbo Liang
    Keywords:
    3C-SiC/diamond interface;
    3C-SiC;
    thermal boundary conductance;
    GaN-on-diamond structure;
    thermal;
    management;
    surface-activated bonding
    Functional Diamond
    Volume 4, Issue 1 (2024)
  • Research progress on electrochemical property and surface modifications of nanodiamond powders

    Liang Dong,
    Guohao Zhu,
    Jianbing Zang,
    Yanhui Wang
    AbstractNanodiamond (ND) has strong chemical stability, the initial oxidation temperature of ND is above 500 °C. A variety of oxygen-containing functional groups are adsorbed on the surface of ND, which makes ND has certain conductivity. Then ND can be used as highly stable catalyst or ideal support material. This paper reviews the properties, functionalization and electrochemical applications of ND. In this review, the catalytic activity and stability of diamond-based catalysts can be further improved by appropriately functionalizing ND, and the research progress in the field of electrochemistry can be increased.
    Keywords:
    Nanodiamond;
    surface modification;
    electrochemical application
    Functional Diamond
    Volume 3, Issue 1 (2023)
  • Research progress of spectra and properties of ultrahard carbon materials at high pressure and high temperature

    Zhiqiang Hou,
    Haikuo Wang,
    Yao Tang,
    Jiakun Wu,
    Chao Wang,
    Zhicai Zhang,
    Xiaoping Ouyang
    Carbon, the fourth most abundant element in the Universe, possesses numerous allotropes with diverse bonding character (sp1-, sp2- and sp3-hybridized bonds) and structural motif of the constituting atoms. In particular, the carbon materials with a fully or nearly 100% sp3-hybridized strong C-C bonds often lead to excellent mechanical properties, chemical stability, thermal and optical properties, such as crystalline diamond and diamond-like amorphous carbon (DLC). In this review, we systematically summarize the synthesis, microstructure, mechanical properties, thermal and optical properties of ultrahard carbon materials with current experimental results on nano-polycrystalline diamond (NPD), nanotwinned diamond (NTD), micro-grained polycrystalline diamond (MPD), and amorphous diamond/carbon. In addition, we discuss the difference of spectra of XRD, Raman and EELS between various nanocrystalline diamond powder and ultrahard carbon materials. Finally, we provide our insights into the future development and applications in the research of ultrahard carbon bulk materials by high-pressure and high-temperature techniques according to the current advantages, limitations and challenges in the experiment.
    Keywords:
    Carbon;
    diamond;
    amorphous;
    spectra;
    properties;
    high pressure and high temperature (HPHT)
    Functional Diamond
    Volume 2, Issue 1 (2022)
  • Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure

    Yurui Wang,
    Deng Gao,
    Tong Zhang,
    Hao Zhang,
    Yu Zhang,
    Qiuming Fu,
    Hongyang Zhao,
    Zhibin Ma
    Combining diamond with GaN can significantly improve the heat dissipation performance of GaN-based devices. However, how to avoid the destructive damage to the GaN epi-layer caused by high-temperature hydrogen plasma during the diamond growth is still a problem. This study employed a Si transition layer and double-substrate structure microwave plasma chemical vapor deposition (MPCVD) to prepare diamond film on GaN epi-layer. The effects of double-substrate structure on the diamond growth were studied. The microwave plasma parameters of both single-substrate structure and double-substrate structure MPCVD diagnosed by emission spectra were comparatively investigated. It has been found that the microwave plasma energy of double-substrate structure MPCVD is relatively more concentrated and has higher radicals activity, which is beneficial to the diamond growth. The impacts of the Si transition layer on the diamond growth were also investigated. It demonstrates that the Si transition layer can effectively protect the GaN epi-layer from being etched by hydrogen plasma and improve the diamond growth. The relationship between the thickness of the Si transition layer and the diamond growth and the relationship between diamond film thickness and adhesion has been studied in detail.
    Keywords:
    MPCVD;
    OES;
    double-substrate structure;
    diamond;
    GaN
    Functional Diamond
    Volume 3, Issue 1 (2023)