Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection

Masataka Imura; Manabu Togawa; Masaya Miyahara; Hironori Okumura; Jiro Nishinaga; Meiyong Liao; Yasuo Koide

doi:10.1080/26941112.2022.2150526

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Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection

Research Article | Updated：2023-01-16

- Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection
- Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection
- Functional Diamond 2022年2卷第1期页码：167-174
- Affiliations：
  
  1. a Research Center for Functional Materials National Institute for Materials Science (NIMS) Tsukuba
  2. b Institute of Particle and Nuclear Studies and International Center for Quantum-field Measurement Systems for Studies of the Universe and Particles (QUP WPI) High Energy Accelerator Research Organization (KEK) Tsukuba
  3. c Faculty of Pure and Applied Sciences University of Tsukuba Tsukuba
  4. d Research Center for Photovoltaics National Institute of Advanced Industrial Science and Technology (AIST) Tsukuba
- Author bio：
- Funds：
- DOI：10.1080/26941112.2022.2150526
  中图分类号：
- 网络首发：2023-01-16，
  
  纸质出版：2022
- Accepted：
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Masataka Imura, Manabu Togawa, Masaya Miyahara, 等. Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection[J]. Functional Diamond, 2022,2(1):167-174.

Masataka Imura, Manabu Togawa, Masaya Miyahara, et al. Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection[J]. Functional Diamond2022, 2(1): 167-174.
Masataka Imura, Manabu Togawa, Masaya Miyahara, 等. Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection[J]. Functional Diamond, 2022,2(1):167-174. DOI： 10.1080/26941112.2022.2150526.

Masataka Imura, Manabu Togawa, Masaya Miyahara, et al. Highly tolerant diamond Schottky barrier photodiodes for deep-ultraviolet xenon excimer lamp and protons detection[J]. Functional Diamond2022, 2(1): 167-174. DOI： 10.1080/26941112.2022.2150526.

摘要

Abstract

The response property and stability of diamond Schottky barrier photodiodes (SBPDs) were investigated for the monitor applications of deep ultraviolet (DUV) light and high-energy radiation particles. The SBPDs were fabricated on the unintentionally doped insulating diamond epilayer grown on a heavily boron-doped p

-diamond (100) conductive substrate by microwave plasma chemical vapor deposition. The vertical-type SBPDs were constructed of semitransparent tungsten carbide (WC) Schottky contact on the top of the device and a WC/titanium ohmic contact on the bottom. The SBPDs were operated to detect the DUV light and protons in zero-bias photovoltaic mode. The spectral response of the SBPDs showed that the peak wavelength was at 182 nm with a sensitivity of 46 ± 1 mA/W. The response speed was shorter than 1 sec

with a negligible charge-up effect and persistent photoconductivity. The SBPDs showed a stable response upon the irradiation by 172-nm xenon excimer lamp with 70 mW/cm

for 200 hrs and 70 MeV protons for the dose of 10 MGy

corresponding to a non-ionizing energy loss of 1.4 × 10

MeV n

/cm

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references

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