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Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls

Shinya Ohmagari
2023年 第3卷 第1期
DOI: 10.1080/26941112.2023.2259941
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关键词

Diamond; Schottky; dislocation; doping; CVD; hot-filament

参考文献

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