Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing

Dan Dai; Jiale Wang; Chengke Chen; Haitao Ye; Nianhua Peng; Jinping Pan; Xiaojun Hu

doi:10.1080/26941112.2024.2330460

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Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing

Research Article | Updated：2025-01-22

- Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing
- Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing
- Functional Diamond 2024年4卷第1期
- Affiliations：
  
  1. c Diamond Joint Research Center for Zhejiang University Technology and Tanghe Scientific and Technology Company De Qing Hu Zhou PR China
  2. d Key Laboratory of Marine Materials and Related Technologies Zhejiang Key Laboratory of Marine Materials and Protective Technologies Ningbo Institute of Materials Technology and Engineering Chinese Academy of Sciences
  3. a College of Materials Science and Engineering Zhejiang University of Technology
  4. a College of Materials Science and Engineering Zhejiang University of Technology Hangzhou PR China
  5. b Moganshan Diamond Research Center De Qing Hu Zhou PR China
  6. c Diamond Joint Research Center for Zhejiang University Technology and Tanghe Scientific and Technology Company De Qing
  7. e School of Engineering University of Leicester
  8. f Surrey Ion Beam Center University of Surrey
  9. g ZheJiang Haina Semiconductor Co. Ltd
- Author bio：
- Funds：
- DOI：10.1080/26941112.2024.2330460
  中图分类号：
- 网络首发：2024-03-22，
  
  纸质出版：2024
- Accepted：
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Dan Dai, Jiale Wang, Chengke Chen, 等. Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing[J]. Functional Diamond, 2024,4(1).

Dan Dai, Jiale Wang, Chengke Chen, et al. Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing[J]. Functional Diamond2024, 4(1).
Dan Dai, Jiale Wang, Chengke Chen, 等. Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing[J]. Functional Diamond, 2024,4(1). DOI： 10.1080/26941112.2024.2330460.

Dan Dai, Jiale Wang, Chengke Chen, et al. Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing[J]. Functional Diamond2024, 4(1). DOI： 10.1080/26941112.2024.2330460.

摘要

Abstract

We investigated the correlation between microstructures and optical properties of boron ion implanted microcrystalline diamond (B-MCD) thin films annealed at different temperatures. Ellipsometry characterization of B-MCD films was performed in the wavelength range of 380–1000 nm and the disperse parameters of the films such as single oscillator energy and dispersive energy were uniquely determined by using a Gaussian model. The results show that the refractive index increases from 2.18 to 2.21 to 2.28–2.29 with annealing temperature increasing from 700 to 800 °C and then it slightly decreases to 2.25–2.28 with annealing temperature further increasing to 900 °C

implying that the annealing temperature has a significant impact on the optical properties of B-MCD films. Raman spectra reveal that the full width at half maximum of diamond peak significantly decreases after 800 °C annealing

indicating a better quality of diamond crystalline. X-ray photoelectron spectroscopy results show that this sample contains higher sp

carbon content

lower sp

and C–O contents on the film surface after 800 °C annealing

implying that fewer

defects exist. The results are of great significance for the preparation of excellent boron ion implanted microcrystalline diamond for waveguide based Mach-Zehnder Interferometer liquid sensing.

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references

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