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Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study
Research Article | Updated:2023-12-24
    • Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study

    • Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study

    • Functional Diamond   2023年3卷第1期
    • DOI:10.1080/26941112.2023.2295346    

      中图分类号:
    • 网络首发:2023-12-24

      纸质出版:2023

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  • Awadesh Kumar Mallik, Rozita Rouzbahani, Fernando Lloret, 等. Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study[J]. Functional Diamond, 2023,3(1). DOI: 10.1080/26941112.2023.2295346.

    Awadesh Kumar Mallik, Rozita Rouzbahani, Fernando Lloret, et al. Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study[J]. Functional Diamond2023, 3(1). DOI: 10.1080/26941112.2023.2295346.

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相关作者

Awadesh Kumar Mallik
Giridharan Krishnamurthy
Wen-Ching Shih
Paulius Pobedinskas
Jan D’Haen
Shinichi Shikata
Shinya Ohmagari
Guoyang Shu

相关机构

b IMEC vzw IMOMEC
c Department of Electrical Engineering Tatung University
School of Engineering Kwansei Gakuin University Sanda
a Sensing System Research Center (SSRC) National Institute of Advanced Industrial Science and Technology (AIST) Tosu Saga Japan
b Advanced Power Electronics Research Center National Institute of Advanced Industrial Science and Technology (AIST) Ikeda
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