Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls

Shinya Ohmagari

doi:10.1080/26941112.2023.2259941

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Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls

Review Article | Updated：2023-09-29

- Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls
- Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls
- Functional Diamond 2023年3卷第1期
- Affiliations：
  
  1. a Sensing System Research Center (SSRC) National Institute of Advanced Industrial Science and Technology (AIST) Tosu Saga Japan
  2. b Advanced Power Electronics Research Center National Institute of Advanced Industrial Science and Technology (AIST) Ikeda
- Author bio：
- Funds：
- DOI：10.1080/26941112.2023.2259941
  中图分类号：
- 网络首发：2023-09-29，
  
  纸质出版：2023
- Accepted：
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Shinya Ohmagari. Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls[J]. Functional Diamond, 2023,3(1).

Shinya Ohmagari. Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls[J]. Functional Diamond2023, 3(1).
Shinya Ohmagari. Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls[J]. Functional Diamond, 2023,3(1). DOI： 10.1080/26941112.2023.2259941.

Shinya Ohmagari. Single-crystal diamond growth by hot-filament CVD: a recent advances for doping, growth rate and defect controls[J]. Functional Diamond2023, 3(1). DOI： 10.1080/26941112.2023.2259941.

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