Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure

Yurui Wang; Deng Gao; Tong Zhang; Hao Zhang; Yu Zhang; Qiuming Fu; Hongyang Zhao; Zhibin Ma

doi:10.1080/26941112.2023.2183097

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Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure

Research Article | Updated：2023-03-02

- Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure
- Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure
- Functional Diamond 2023年3卷第1期
- Affiliations：
  
  Hubei Key Laboratory of Plasma Chemistry and Advanced Materials Department of Materials Science and Engineering Wuhan Institute of Technology
- Author bio：
- Funds：
- DOI：10.1080/26941112.2023.2183097
  中图分类号：
- 网络首发：2023-03-02，
  
  纸质出版：2023
- Accepted：
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Yurui Wang, Deng Gao, Tong Zhang, 等. Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure[J]. Functional Diamond, 2023,3(1).

Yurui Wang, Deng Gao, Tong Zhang, et al. Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure[J]. Functional Diamond2023, 3(1).
Yurui Wang, Deng Gao, Tong Zhang, 等. Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure[J]. Functional Diamond, 2023,3(1). DOI： 10.1080/26941112.2023.2183097.

Yurui Wang, Deng Gao, Tong Zhang, et al. Preparation of diamond on GaN using microwave plasma chemical vapor deposition with double-substrate structure[J]. Functional Diamond2023, 3(1). DOI： 10.1080/26941112.2023.2183097.

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