Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever

Kanta Yamakawa; Yuta Ochiai; Takahito Ono; Masaya Toda

doi:10.1080/26941112.2024.2389801

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Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever

Research Article | Updated：2025-01-22

- Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever
- Functional Diamond Vol. 4, Issue 1, (2024)
- Affiliations：
  
  1. a Graduate School of Engineering Tohoku University
  2. a Graduate School of Engineering Tohoku University Sendai Japan
  3. b Micro System Integration Center Tohoku University
- Author bio：
- Funds：
- DOI：10.1080/26941112.2024.2389801
  CLC：
- Online First：09 August 2024，
  
  Published：2024
- Accepted：
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Kanta Yamakawa, Yuta Ochiai, Takahito Ono, et al. Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever[J]. Functional Diamond2024, 4(1).
DOI：

Kanta Yamakawa, Yuta Ochiai, Takahito Ono, et al. Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever[J]. Functional Diamond2024, 4(1). DOI： 10.1080/26941112.2024.2389801.

摘要

Abstract

In this study

we developed a cantilever-type force probe with a nano-diamond nitrogen vacancy color center (NVC) fixed on Si surface by sputtered SiO

layer. We explored the correlation between the optically detected magnetic resonance (ODMR) spectrum’s peak shift and the stress intensity caused by the cantilever’s vibration. By adjusting the crystal axis of the nano-diamond and the static magnetic field

we assessed the peak shift’s dependency on these variables. Our results indicated that the peak shift could effectively detect uniaxial stress from standard vibration. Moreover

with increasing vibration amplitude

the peak shift proportionally intensified

consistent with theoretical expectations. For multi-axial vibration involving torsion

we noted multiple peak shifts in positive direction

suggesting stress along the axis. These findings confirm the potential of nano-diamonds on cantilevers to measure multiaxial stress.

关键词

Keywords

references

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