Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study

Awadesh Kumar Mallik; Rozita Rouzbahani; Fernando Lloret; Rani Mary Joy; Ken Haenen

doi:10.1080/26941112.2023.2295346

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Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study

Research Article | Updated：2023-12-24

- Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study
- Functional Diamond Vol. 3, Issue 1, (2023)
- Affiliations：
  
  1. b IMOMEC IMEC vzw Diepenbeek Belgium
  2. c Temasek Laboratories Nanyang Technological University
  3. a Institute for Materials Research (IMO) Hasselt University Diepenbeek Belgium
  4. b IMOMEC IMEC vzw
  5. d Dpt. Física Aplicada Universidad de Cádiz
- Author bio：
- Funds：
- DOI：10.1080/26941112.2023.2295346
  CLC：
- Online First：24 December 2023，
  
  Published：2023
- Accepted：
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Awadesh Kumar Mallik, Rozita Rouzbahani, Fernando Lloret, et al. Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study[J]. Functional Diamond2023, 3(1).
DOI：

Awadesh Kumar Mallik, Rozita Rouzbahani, Fernando Lloret, et al. Effect of substrate roughness on the nucleation and growth behaviour of microwave plasma enhanced CVD diamond films – a case study[J]. Functional Diamond2023, 3(1). DOI： 10.1080/26941112.2023.2295346.

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Related Institution

b IMEC vzw IMOMEC

c Department of Electrical Engineering Tatung University

School of Engineering Kwansei Gakuin University Sanda

a Sensing System Research Center (SSRC) National Institute of Advanced Industrial Science and Technology (AIST) Tosu Saga Japan

b Advanced Power Electronics Research Center National Institute of Advanced Industrial Science and Technology (AIST) Ikeda

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