Progress in semiconductor diamond photodetectors and MEMS sensors

Meiyong Liao

doi:10.1080/26941112.2021.1877019

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Progress in semiconductor diamond photodetectors and MEMS sensors

Articles | Updated：2021-02-19

- Progress in semiconductor diamond photodetectors and MEMS sensors
- Functional Diamond Vol. 1, Issue 1, Pages: 29-46(2021)
- Affiliations：
  
  Research Center for Functional Materials National Institute for Material Science Tsukuba
- Author bio：
- Funds：
- DOI：10.1080/26941112.2021.1877019
  CLC：
- Online First：19 February 2021，
  
  Published：2021
- Accepted：
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Meiyong Liao. Progress in semiconductor diamond photodetectors and MEMS sensors[J]. Functional Diamond2021, 1(1): 29-46.
DOI：

Meiyong Liao. Progress in semiconductor diamond photodetectors and MEMS sensors[J]. Functional Diamond2021, 1(1): 29-46. DOI： 10.1080/26941112.2021.1877019.

摘要

Abstract

Diamond with an ultra-wide bandgap shows intrinsic performance that is extraordinarily superior to those of the currently available wide-bandgap semiconductors for deep-ultraviolet (DUV) photoelectronics and microelectromechanical systems (MEMS). The wide-bandgap energy of diamond offers the intrinsic advantage for solar-blind detection of DUV light. The recent progress in high-quality single-crystal diamond growth

doping

and devices design have led to the development of solar-blind DUV detectors satisfying the requirement of high

ensitivity

high

ignal-to-Noise ratio

high spectral

electivity

high

peed

and high

tability. On the other hand

the outstanding mechanical hardness

chemical inertness

and intrinsic low mechanical loss of diamond enable the development of MEMS sensors with boosted sensitivity and robustness. The micromachining technologies for diamond developed in these years have opened the avenue for the fabrication of high-quality single-crystal diamond mechanical resonators. In this review

we report on the recent progress in diamond DUV detectors and MEMS sensors

which includes the device principles

design

fabrication

micromachining o

f diamond

and devices physics. The potential applications of these sensors and a perspective are also described.

关键词

Keywords

references

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b Department of Physics Hebei Normal University of Science and Technology Qinhuangdao

a National Institute for Materials Science Tsukuba

c International Center for Materials Nanoarchitectonics (MANA) National Institute for Materials Science Tsukuba

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